Ion-implanted E-IGFET의 도핑 profile을 임의로 가정하여 threshold 전압을 구하였고. short-channoel에 적용할 때 correction factor K의 개념을 사용하였다. Threshold전압의 이론치는 실험치와 잘 일치하였고, 또한 I-V특성도 실험치와 잘 일치하였다. 아울러 이 program을 package화 하여 실용화시켰다.
A simple model for the impurity profile in an ion-implanted channel layer of an enhance-ment type IGFET is assumed and a simple expression for the threshold voltage is derived by the assumed impurity profile. In application, the concept of correction factor K is used and the value of threshold voltage is well agreed with experimental value. Also, 1-V character-istics curve is well agreed with experimental value. In addition, this program is packaged and is utilized.
