The e(lect of capacitance error on the A/D conversion accuracy in the A/D converter using binary-weighted capacitor array was scruntized. Besides the Monte-Carlo method considering the inter-capacitance ratios as random variables, " correlation approach" con-sidering the correlation coefficient between capacitances is proposed in this paper. Bt was observed by the measurement of capacitances of monolithic MO5 capacitors that the correla-tion coefficient between capacitors decreases as the capacitor size incrrases. It was also verified that the parallel connection of unit capacitors and the common centroid layout scheme signi(icantly increase the inter-capacitance correlation coefficients.