High temperature superconducting films of $YBa_2Cu_3O_{7-x}$ were fabricated on the (100) single crystal faces of YSZ (yttria stabilized zirconia) and SrTi$O_3$ by aerosol spray using ultrasonic atomization. The superconducting phase was formed by a three-step process: (a) spraying of a stoichiometric solution of nitrates of yttrium, barium, and copper on heated substrates kept at 250$^{circ}C$, (b) preheating of the sprayed films in air at 550$^{circ}C$, and (e) sintering of the films in flowing oxygen at 950$^{circ}C$, followed by furnace cooling. Resistances of the films were measured by the dc four-probe method and superconductivity was confirmed above the liquid nitrogen temperature.