- Laser Ablation에 의하여 $LaAlO_3$(100) 기판 위에 증착된 Y-Ba-Cu-O 박막에 대한 연구
- ㆍ 저자명
- 조윌렴,이규철,고도경,이헌주,노태원,김정구,허필화
- ㆍ 간행물명
- 요업학회지
- ㆍ 권/호정보
- 1991년|28권 12호|pp.1005-1011 (7 pages)
- ㆍ 발행정보
- 한국세라믹학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
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Y-Ba-Cu-O thin films were in-situ fabricated on LaAlO3(100) substrates using the second harmonics of a pulsed Nd:YAG laser. Thin films were deposited under 200 (mtorr) of oxygen atmosphere, when the substrate temperature was changed between 67$0^{circ}C$ and 82$0^{circ}C$. After deposition, the films were in-situ annealed at 50$0^{circ}C$ under 2/3 bar of oxygen pressure. We showed that the deposition temperature affects the formation of superconducting phase, the resistance, and the surface morphology. The Y-Ba-Cu-O thin films deposited at 76$0^{circ}C$ show the zero resistance critical temperature of 85 K.