When non-contact type vibration probes are used for the precision measurement of shaft vibration, they can induce the measurement errors due to the shaft curvature since they have been calibrated for the flat plate. In this study the errors due to the shaft radius and the misalignment between the shaft and probe centerlines are analyzed, and an in-situ calibration tool, which can be conveniently used for calibration independent of the shaft curvature and material, is introduced.