반도체 pH 센서인 pH-ISFET와 효소고정화막을 기술적으로 결합한 FET형 반도체 요소 및 포도당센서를 제조하고 그 동작특성을 조사하였다. 사진식각기술을 이용하여 pH-ISFET의 수소이온 감지막 위에 urease와 glucose oxidase를 감광성 고분자 물질인 PVA(polyvinyl alcohol)-SbQ(stilbazolium group)로 고정화(immobilization)시켰다. 제조된 요소센서와 포도당센서는 각각 $0.5{sim}50{;}mg/dl$ 범위의 요소농도와 $10{sim}1000{;}mg/dl$ 포도당 농도를 정량 할 수 있었다.
pH-ISFETS, the semiconductor pH sensors, were combined with immobilized enzyme membranes to prepare FET type urea and glucose sensors and its operational characteristics were investigated. Photolithography techniques were applied to immobilize enzymes on the $H^{+}$ sensing membrane of the pH-ISFET with photo-sensitive polymers, PVA-SbQ. Fabricated urea and glucose sensors could determine $0.5{sim}50{;}mg/dl$ urea concentrations and $10{sim}1000{;}mg/dl$ glucose concentrations, respectively.
