- 생선의 신선도 측정을 위한 반도체 센서
- ㆍ 저자명
- 박성현,권태하,Bak. Sung-Hyun,Kwon. Tae-Ha
- ㆍ 간행물명
- 한국어업기술학회지
- ㆍ 권/호정보
- 1993년|29권 4호|pp.272-278 (7 pages)
- ㆍ 발행정보
- 한국어업기술학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
The trimethylamine-sensing characteristics of ZnO based thin film semiconductors and the sensitivity enhancement by squttering conditions have been investigated to develop a new type sensor for detecting fish freshness. The sensor fabricated with a 300nm of ZnO thin film with 4 wt% Al sub(2) O sub(3) and 1 wt% TiO sub(2) exhibited the highest sensitivity of 155 at 30$0^{circ}C$ of working temperature and to the 240 ppm TMA gas. Deposition of ZnO thin film using a RF magnetron sputter was carried out at a pressure of 10 super(-2) Torr in pure oxygen gas with an RF power of 100W. The sensor exhibited a large response to the actual gases produced by a mackerel at an early stage of decomposition.