Touch trigger probes are widely used for inspection purposed in the CMM(Coordinate meauring machine) or machine tool. The errors introduced by measurement probe are fairy systematic, thus can be calibrated and compensated properly. This paper presents a technique for the error calibration and compensation of the probe errors, which can be easily applicable to the manufacturers and users of the measurement probe. The probe coordinate system is defined for the probe error assessment, and a reference sphere ball is measured, and the probe errors are calibrated. The calibrated probe errors are represented in the 3D error map and 2D error map along probing direction. Detail algorithms for the error compensation are proposed.