- ITO/Glass 기판위에 제조된 강유전성 $PbTiO_3$ 박막의 특성
- ㆍ 저자명
- 김승현,오영제,김창은
- ㆍ 간행물명
- 요업학회지
- ㆍ 권/호정보
- 1994년|31권 11호|pp.1315-1322 (8 pages)
- ㆍ 발행정보
- 한국세라믹학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
In this study, stable PbTiO3 coating solution was prepared using diethanolamine(DEA) complexing agent and deposited on indium-tin oxide(ITO) coated glass substrate. Prepared thin films were dense and crack-free. Perovskite-type PbTiO3 thin films could be obtained above 50$0^{circ}C$, while the films heat-treated above $650^{circ}C$ showed undesired properties due to interface reactions between films and substrates and warpage phenomena of substrates. Measured maximum dielectric constant and loss tangent were found to be 144 and 0.0163 at 1 kHz, 55$0^{circ}C$ heat-treatment, respectively.