The purpose of this research is to examine precise linear motion and rotary motion. A six-degrees-of-freedom fine motion mechanism is introduced to drive an object precisely in directions of X, Y and Z-axes and around them : three rectangular linear motion and rotary ones. An experimental mechanism is introduced in which a $70$ imes$70$ imes$70$ imes$(${mm}^3$) cube object is driven by six PZT actuator. The study is to establish the six-degrees-of-freedom fine motion mechanism of linear motion and rotary motion using PZT actuator.