Sensor system which can detect a flowing cell is designed and fabricated by semiconductor processing and EDM(Electro-chemical Discharge drilling Method). Two methods are used in this paper; 1) optical method which measures the trasmitted light through the cell passage between transmitter and receiver, 2) impedance method which measures impedance change between electrodes, when cell flows in the cell passage. Experimental result using tabaco leaves shows that the ouput value by optical method is 0.2V to 0.7V, and the output by impedance method is 0.2V to 2V, which is bigger, but it includes an avoidable noises.