- 졸-겔법에 의한 $TiO_2$ 박막의 특성에 관한 연구
- ㆍ 저자명
- 황규석,김병훈
- ㆍ 간행물명
- 요업학회지
- ㆍ 권/호정보
- 1995년|32권 3호|pp.281-288 (8 pages)
- ㆍ 발행정보
- 한국세라믹학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
to prepare the TiO2 thin films, acetyl-acetone(2.4-pentanedione)(1 : 1 molar ratio) was dissolved in the propanol solution of titanium(IV)isopropoxide(Ti[OCH(CH3)2]4). Al, Cr and Sb in the form of soluble salt and niobium ethoxide were added s dopants, respectively. Thin films were coated by the dip-coating method and characteristics were investigated by XRD, SEM and conductance meter. As a result, viscosity of sol was maintained below 4 centi Poise more than 20 days, and crystal growth and diminution of resistivity occurred as the heat treatment temperature increased. The grains grew over 1${mu}{ extrm}{m}$ and the lowest resistivity was obtained when Nb was added at 130$0^{circ}C$.