- $WO_3$ 박막을 이용한 $NO_x$ 센서의 제조 및 가스감도 특성
- ㆍ 저자명
- 유광수,김태송,정형진
- ㆍ 간행물명
- 요업학회지
- ㆍ 권/호정보
- 1995년|32권 12호|pp.1369-1376 (8 pages)
- ㆍ 발행정보
- 한국세라믹학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
The WO3 thin-film NOx sensor which is of practical use and includes the heater and the temperature sensor was fabricated. The WO3 thin films as a gas-sensing layer was deposited at ambient temperature in a high-vacuum resistance heated evaporator. The highest sensitivity of the WO3 thin-film sensor to NOx was obtained under the condition of the annealing temperature of 50$0^{circ}C$ and the operating temperature of 30$0^{circ}C$. The gas sensing characteristics of this sensor was excellent, i.e. high sensitivity (Rgas/Rair in 3 ppm NO2=53) and fast response time (4 seconds).