- 열처리에 따른 Cu/Cr 다층 박막의 미세 조직 관찰
- ㆍ 저자명
- 양혁수,김기범
- ㆍ 간행물명
- 한국표면공학회지
- ㆍ 권/호정보
- 1995년|28권 6호|pp.376-385 (10 pages)
- ㆍ 발행정보
- 한국표면공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Copper-chromium multilayers with a nominal bilayer thickness of about 400 $AA$ (200 $AA$ each) were prepared by dc magnetron sputtering and the evolution of microstructure during heat treatment was investigated by using x-ray diffractometry(XRD), Auger electron spectroscopy(AES) and transmission electron microscopy(TEM). It was observed that an amorphous phase with a thickness of about 40 $AA$ was formed at the interfaces of the as-deposited Cu/Cr multilayered film using cross-sectional TEM. At elevated temperatures, the Cu(111) reflection showed increasing intensity and decreasing line-width as a result of copper grain growth. The intermixed amorphous phase disappeared after annealing at $250^{circ}C$ for 1 h and the multilayer structure was stable up to $400^{circ}C$ for 1 h annealing. At $600^{circ}C$ annealing, it was observed that the multilayer structure was completely destroyed and copper and chromium phases were fully intermixed.