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Ba$^{0.7}Sr^{0.3}TiO^{3}$ 박막 커패시퍼의 마이코로파 측정
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  • Ba$^{0.7}Sr^{0.3}TiO^{3}$ 박막 커패시퍼의 마이코로파 측정
저자명
장병택,차선용,이승훈,곽동화,이희철,유병곤,백종태,유형준
간행물명
電子工學會論文誌. Jounnal of the Korea institute of telematics and electronics. A. A
권/호정보
1996년|2호|pp.114-121 (8 pages)
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대한전자공학회
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
서지반출

기타언어초록

Thin film Ba$^{0.7}Sr^{0.3}TiO^{3}$ (BST) capacitors were fabricated on SiO$_{2}$/Si substrates by RF magnetron sputtering method and characterized at microwave frequencies ranging from 40 MHz to 1GHz to examine the dielectric dispersion of the capacitors. The BST thin films were electrode material of BST thin films capacitor which is known as one of the best electrode materials for BST films. 50$AA$-thick titanium (Ti) layers were introduced to increase adhesion between bottom Pt and SiO$_{2}$. The leakage current density of the capacitors was about 1.7${ imes}10^{7}A/cm^{2}$ at 1.5V and the dielectric constant was about 140 at 1MHz. Microwave measurement patterns having a coplanar waveguide type were fabricated and their S parameters were measured using network analyzer. After de-embedding parasitic components in microwave measurement patterns nearly frequency-invariant dielectric constant of about 120 was extracted in the measurement range of 40 MHz to 1 GHz.