For ultra-pure water, the removal of various impirities is required, and the requirement level is rising year by year. To cope with this problem, various removing technologies and system technologies have been developed and the introduction of new materials for the piping, etc. to form the system have been positively made. For the element technologies to be used for ultra-pure water production, their range will be expanded from the technological and economic viewpoints. Therefore, it is absolutely necessary to develop trace analysis evaluation technologies for ultra-pure water. Especially to raise the analytical level of heavy metals and organic substances is important. It is also important to establish individual analysis methods of organic substances. It is expected that the analytical methods will be established and new treating methods will be put to practical use in the near future.