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Fabrication and Characteristics of High-performance Doped-$SnO_2$ Thin Films for Explosive Gas Sensor
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  • Fabrication and Characteristics of High-performance Doped-$SnO_2$ Thin Films for Explosive Gas Sensor
  • Fabrication and Characteristics of High-performance Doped-$SnO_2$ Thin Films for Explosive Gas Sensor
저자명
Chwa. Sang-Ok,Park. Hee-Chan,Kim. Kwang-Ho
간행물명
The Korean journal of ceramics
권/호정보
1996년|2권 2호|pp.83-88 (6 pages)
발행정보
한국세라믹학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

Long term stability, sensitization in air, and gas sensing behaviors of tin oxide films were investigated with doping of antimony and palladium. The tin oxide films were prepared on a Corning glass by reactive rf sputtering method and tested for detection of hydrogen gas. Sb-doping improved a long-term stability in the base resistance of $SnO_2$ film sensor. A small amount of Pd doping caused the optimum sensor operating temperature to reduce and also enhanced the gas sensitivity, compared with the undoped $SnO_2$ film. Gas sensitivity depended largely on the film thickness. The important sensitization reactions for sensor operating were $(O_{2ads})+e^-;{ ightarrow};2(O_{ads})^-$ on the surface of $SnO_2$ film at elevated temperature in air and a followed reaction of hydrogen atoms with $(O_{ads})^-$ ions.