- MOCVD법에 의해 성장시킨 PZT박막의 XPS 분석
- ㆍ 저자명
- 김영관,추정우,손병청,황찬용,김태송,오영희
- ㆍ 간행물명
- 韓國眞空學會誌
- ㆍ 권/호정보
- 1996년|5권 2호|pp.93-98 (6 pages)
- ㆍ 발행정보
- 한국진공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Thin films of Lead Zirconate Titanate, $Pb(Zr_xTi_{1-x})O_3$(PZT), were grown on $Pt/SiO_2/Si(100)$ by metalorganic chemical vapor deposition(MOCVD). These films were analyzed with X-ray Phptoemission Spectroscopy(XPS) for determining their chemical composition and chemical bonding characteristics. It was found that the chemical compositions and chemical bondings of ions in the near surface are different from those in the bulk region of the films. The oxidation state of Ti ions in the bulk region is reduced in comparison to that of Ti ions ini the surface region of the films and Pb enrichment in the surface region was also observed. Pb ions in the surface region exists mainly in the form of $PbO_{ads}$(oxygen-chemisorbed lead), but Pb ions in the bulk region exists in the form of mixture of PbO and $PbTiO_3$