- 평면 표시형 구면경분석기의 분광 특성
- ㆍ 저자명
- 정재인,이영백
- ㆍ 간행물명
- 韓國眞空學會誌
- ㆍ 권/호정보
- 1996년|5권 3호|pp.188-193 (6 pages)
- ㆍ 발행정보
- 한국진공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
A new display -type spherical mirror analyzer has been characterized in terms of the performance and the auger spectra taken by using it. The final goal with the analyzer is to devleop SET(Surface Electron Spectroscopic Tomography) which is capable to provide a 3-dimensional layer-by-layer information nondestructively. This kind of analyzer was originally designed by H.Daimon. The main feature is to display 2-dimensional electronic structures directly onto a screen. In our case, an external micro-electron beam was employed as an excitation source. However, this invokes various problems because of the interference between the electron beam and the analyzer. The problems have been solved through the optimization of various parameters of the analyzer.