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절연보호막 처리된 Al-1 % Si박막배선에서 D.C.와 Pulsed D.C. 조건하에서의 electromigration현상에 관한 연구
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  • 절연보호막 처리된 Al-1 % Si박막배선에서 D.C.와 Pulsed D.C. 조건하에서의 electromigration현상에 관한 연구
저자명
배성태,김진영
간행물명
韓國眞空學會誌
권/호정보
1996년|5권 3호|pp.229-238 (10 pages)
발행정보
한국진공학회
파일정보
정기간행물|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

The electromigration phenomena and the characterizations of the conductor lifetime (Time-To-Failure, TTF) in Al-1%Si thin film interconnections under D.C. and Pulsed D.C. conditions were investigated . Meander type test patterns were fabricated with the dimensions of 21080$mu extrm{m}$ length, 3$mu extrm{m}$ width, 0.7$mu extrm{m}$ thickness and the 0.1$mu extrm{m}$/0.8$mu extrm{m}$($SiO_2$/PSG)dielectric overlayer. The current densities of $2 imes10^6 A/ extrm{cm}^2$ and $1 imes10^7 A/ extrm{cm}^2$ were stressed in Al-1%Si thin film interconnection s under a D.C. condition. The peak current densities of $2 imes10^6 A/ extrm{cm}^2$ and $1 imes10^7 A/ extrm{cm}^2$ were also applied under a Pulsed D.C. condition at frequencies of 200KHz, 800KHz, 1MHz, and 4MHz with the duty factor of 0.5. THe time-to-failure under a Pulsed D.C.($TTF_{pulsed D.C}$) was appeared to be larger than that under a D.C. condition. It was found that the TTF under both a D.C. and a Pulsed D.C. condition. It was found that the TTF under both a D.C. and a Pulsed D.C. condition largely depends upon the appiled current densities respectively . This can be explained by a relaxation mechanism view due to a duty cycle under a Pulsed D.C. related to the wave on off. The relaxation phenomena during the pulsed off period result in the decayof excess vacancies generated in the Al-1%Si thin film interconnections because of the electrical and mechanical stress gradient . Hillocks and voids formed by an electromigration were observed by using a SEM (Scanning Electron Microscopy).