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Trihydric Phenol계 Photoresist의 합성과 그 감광 특성
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  • Trihydric Phenol계 Photoresist의 합성과 그 감광 특성
  • Synthesis and Photocharacteristics of Trihydric Phenol Photoresist
저자명
홍의석,고재용,박홍수,Hong. Eui-Suk,Ko. Jae-Yong,Park. Hong-Soo
간행물명
한국유화학회지
권/호정보
1996년|13권 1호|pp.47-54 (8 pages)
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한국유화학회
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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Cinnamoyl ester(PGEFC) of poly(phloroglucinol-formaldehyde) glycidyl ether which has photosensitive functional group was prepared to apply to photoresist. Photosensitivity of PGEFC was estimated by the solubility difference in organic solvent before and after exposure to light. The yield of residual film was calculated by immersing the sample-coated quartz plates in the solvent which was used in coating. The yield of the residual film which was closely related to the sensitivity of the film, was affected by the degree of polymerization of the backbone resin, sensitizers and their concentration. The sensitivity was depended upon the degree of polymerization. Most of effective sensitizer for PGEFC among the sensitizers was 2, 6-dichloro-4-nitroaniline.