- TFT LCD 자동생산시스템에서 Data 통신 및 응용
- ㆍ 저자명
- 조민호,Jo. Min-Ho
- ㆍ 간행물명
- 산업공학
- ㆍ 권/호정보
- 1996년|9권 3호|pp.225-235 (11 pages)
- ㆍ 발행정보
- 대한산업공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
The SECS Ⅰ and Ⅱ Protocol has been widely used for the TFT LCD and semiconductor industry. This paper shows how the SECS protocol is implemented for data communications between the Host (CAM) and the TFT LCD equipments. In addition, this study introduces a way to apply the SECS protocol to the manufacturing systems control. It provides better throughput in terms of production and faster control of the automated TFT LCD manufacturing system by way of shortcut and distribution of control and data communications. The SECS protocol is successfully used for the control of the real TFT LCD manufacturing system.