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AOTF용 광도파로 및 IDT 전극제작
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  • AOTF용 광도파로 및 IDT 전극제작
  • The characteristics of optical waveguides and IDT electrodes fabriacted for acousto-optic tunable filters
저자명
윤형도,한상필,김성구,임영민,윤대원
간행물명
電子工學會論文誌. Journal of the Korean Institute of Telematics and Electronics. D
권/호정보
1997년|11호|pp.76-82 (7 pages)
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대한전자공학회
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

The characteristics of optical waeguides and IDT electrodes fabricated for acousto-optic tunable filters (AOTE) used for optical communications were analyzed. A $Ti:LiNbO_3$ in-diffusion method was employed for the formation of the optical waveguide with a dimension of width $8mu extrm{m}$, length $30000mu extrm{m}$, and thickness $1150{AA}$. The diffusion was carried at $1050^{circ}C$ for 8 houss to pattern the optical waveguide with Ti. The resulted waveguide exhibited a single mode at a 1550nm wavelength range and its propagation loss was less than 0.5dB/cm. The width of IDT, with 10 SAW periods, was $5000mu extrm{m}$, S11 reflection characteristics and impedances of th eelectrodes deposited with Au were analyzed using a network analyzer; $48.1Omega$ at th ecenter frquency of 193MHz for Au deposition thickness of $1500{AA}$ and $50.7Omega$ at the center frequency of 192MHz for au deposition thickness of $1600{AA}$.