A fast tool servo (FTS) for diamond turning improves machining accuracy by quickly compensating relative position errors between the cutter and the workpiece. Therefore, the FTS needs to have large band-width with good tracking performance. Serious hysteresis nonlinearity of PZT actuators used in the FTS, however, deteriorates fast tracking performance. Several types of feedforward hysteresis compensators and feedback controllers are tested to improve tracking performance. Through simulations and experiments, control structure which yields the smallest tracking error is selected. The maximum peak to peak error in tracking a sinusoidal waveform is reduced by one fifth compared to that of a regular PID controller.