- 스퍼터링 TiO$_2$막의 구조 및 광학적 성질에 미치는 열처리 효과
- ㆍ 저자명
- 박성진,이수일,오수기
- ㆍ 간행물명
- 한국표면공학회지
- ㆍ 권/호정보
- 1997년|30권 1호|pp.63-68 (6 pages)
- ㆍ 발행정보
- 한국표면공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
The effects of the post-deposition annealing on the structural optical properties of sputtered $TiO_2$ thin films were studied; annealing was carried out in air up to $1000^{circ}C$ for different duration. The results of the X-ray diffraction and the raman spectroscopy showed the annealing-condition dependent structural transformation of $TiO_2$ films from the as-deposited amorphous phase to the anatase and rutil phases. The spectroscopic elliposometry was used to investigate the deposition-condition dependence of the as-deposted films optical constants and also the evolution of the optical constants correlated with the annealing-induced structural transformation.