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$Se/NH_4OH$용액으로 처리시킨 n-GaAs의 Photoreflectance에 관한 연구
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  • $Se/NH_4OH$용액으로 처리시킨 n-GaAs의 Photoreflectance에 관한 연구
  • A Study on Photoreflectance of n-GaAs Treated with$Se/NH_4OH$ Solution
저자명
김근형,김인수,이정열,이동건,배인호,박성배
간행물명
電氣電子材料學會誌= The journal of the Korean Institute of Electrical and Electronic Material Engineers
권/호정보
1997년|10권 6호|pp.555-561 (7 pages)
발행정보
한국전기전자재료학회
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

The passivation of n-GaAs(100) surface has investigated by photoreflectance(PR). The surface of the sample was treated with the 0.001 N solution Se/NH$_4$OH. After the surface treatment, the samples were annealed between 400 to $700^{circ}C$ in a $N_2$atmosphere for 10 min. The intensity of PR signal and period of Franz-Deldysh oscillation(FKO) gradually decreased as the annealing temperature increased. The surface electric field(E$_{s}$) of the sample annealed at $600^{circ}C$ is obtained 1.34$ imes$10$^{5}$ V/cm. This value is 1.97 times less than that of unannealed sample. It has found that the passivation of surface occurred when the surface of the sample had been treated with Se/NH$_4$OH solution and annealed from 500 to $600^{circ}C$. This result could be due to activation of elemental Se on the surface. It has also found that the elemental Se of the surface diffused about 100 $AA$ into the bulk GaAs when Se-treated sample was annealed at $600^{circ}C$.>.