Multimode planar waveguides have been fabricated by an electric-field assisted ion exchange in soda-lime glass substrates. Measurements of the mode indices have been made and the index profiles modeled on modified Fermi function are explained by a comparative analysis with the concentration profiles obtained using an electron probe X-ray micro analyzer. The analytical measurements showed that no more than 95% of sodium ions were replaced by the cesium ions. We established formulas for guide depth, mobility, and refractive index change, given the applied electric field, the diffusion temperature, and the time. We have verified the linear relations in the formulas not only between guide and root of diffusion time but also between guide depth and the applied electric filed experimentally.