- 솔-젤법을 이용한 Bismuth Layered Structure를 가진 강유전성 박막의 제조 및 특성평가에 관한 연구
- ㆍ 저자명
- 주진경,송석표,김병호
- ㆍ 간행물명
- 요업학회지
- ㆍ 권/호정보
- 1998년|35권 9호|pp.945-952 (8 pages)
- ㆍ 발행정보
- 한국세라믹학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Ferroelectric Sr0.8Bi2.4Ta2O9 stock solutions were prepared by MOD(Metaloganic Decompostion) process. The phase transformation for the layered perovskite of the SBT thin films by changing RTA(Rapid her-mal Annealing) temperatuer from 700$^{circ}C$to 780$^{circ}C$ were observed using XRD and SEM. Layered perovskite phase began to appear above 740$^{circ}C$ and then SBT thin films were annealed at 800$^{circ}C$ for 1hr for its com-plete crystallization. The specimens showed well shaped hysteresis curves without post annealing that car-ried out after deposition of Pt top electrode. The SBT thin films showed the asymmetric ferroelectric pro-perties. It was confirmed that the properties were caused by interface effect to SBT and electrode by leak-age current density measurement and asymmetric properties reduced by post annealing. At post annealing temperature of 800$^{circ}C$ remanant polarization values (2Pr) were 6.7 9 ${mu}$C/cm2 and those of leakage current densities were 3.73${ imes}$10-7 1.32${ imes}$10-6 A/cm2 at 3, 5V respectively. Also bismuth bonding types of SBT thin film surface were observed by XPS.