- Heterostructure 열처리에 의한 Bi 조성 제어가 SrBi$_2$Ta$_{2-x}$Nb$_x$O$_9$ 박막의 강유전 특성에 미치는 영향
- ㆍ 저자명
- 박윤백,이전국,정형진,박종완
- ㆍ 간행물명
- 요업학회지
- ㆍ 권/호정보
- 1998년|35권 10호|pp.1040-1048 (9 pages)
- ㆍ 발행정보
- 한국세라믹학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Ferroelectric properties of{{{{ { { { {SrBi }_{2 }Ta }_{2-x }Nb }_{x }O }_{9 } }} (SBIN) thin films were affected by the amount of Bi content in SBTN. The addition of Bi into the SBTN films could be accomplished by heat treating SBTN/Bi2O3/SBTN het-erostructures fabricated by r.f. magnetron sputtering method. The variation of Bi content was controlled by changing the thickness of the sandwiched Bi2O3 in SBTN/Bi2O3/SBTN heterostructure from 50 to 400$AA$. As changing the thickness of the sandwiched Bi2O3 in Bi2O3 films was increased from 0 to 100$AA$ the grain grew faster and the ferroelectric pro-perties were improved. On the other hand when the thickness of Bi2O3 films was thicker than 150$AA$ the fer-roelectric properties were deteriorated Especially for SBTN thin films inserted by 400$AA$ Bi2O3 layer a Bi2Phase appeared as a second phase resulting in poor ferroelectric properties. The maximum remanent po-larization (2Pr) and coercive field(Ec) were obtained for the SBTN/Bi2O3/(100$AA$)/SBTN thin films. In this case 2Pr and Ec were 14.75 $mu$C/cm2 and 53.4kV/cm at an applied voltage of 3V respectively.