The decomposition performance of the Surface induced Plasma Chemical Processing(SPCP) for benzene, toluene, xylene and $NO_2$ were experimentally examined. Discharge exciting frequency range was 5kHz and 10kHz, and low frequency discharge requires high voltage to inject high electric power in gas and to decompose contaminants. The decomposition rate of dioxide nitrogen for 5kHz power in gas and to decompose contaminants. The decomposition rate of dioxide nitrogen for 5kHz power supply is only 85%, but it’s rate for 10kHz power supply is very high, more than 96% when peak voltage is 12kv. Aromatic hydrocarbon vapor of up to 1000ppm is almost throughly decomposed at the flow rate of 1000$ell$/min or lower rate under the discharge with electric power of several hundred watts. High decomposition rate is shown in every case, that is, for SPCP reactor is necessary to obtain the decomposition rate of more than 80~98%. The decomposition rate of benzene, toluene and xylene were 90~98% and dioxide nitrogen was 45~96%.