- 실리콘 웨이퍼 위에 제작된 DLPC 지질막의 전기적특성
- ㆍ 저자명
- 이우선,김충원,이강현,정용호,김남오,김상용
- ㆍ 간행물명
- 전기전자재료학회논문지
- ㆍ 권/호정보
- 1998년|11권 12호|pp.1115-1121 (7 pages)
- ㆍ 발행정보
- 한국전기전자재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
MLS capacitor with lipid ultra thin films were deposited by Langmuir-Blodgett (LB) method on the silicon wafer. The current versus voltage and capacitance versus voltage relationships are depend on the applied voltage, electrode area and electrode materials. LB films deposited were made of L-$alhpa$-DLPC, the 1 layer’s thickness of 35${AA}$ was measured by ellipsometer. And MLS capacitor with different electrode materials, the work function of these materials was investigated to increase the leakage current. The result indicated the lower leakage current and very high saturation value of capacitance was reached within 700-800 pF when the two electrode was Ag. And $varepsilon$1, $varepsilon$2 versus photon energy showed good film formation.