- 전자기력을 이용한 3 자유도 정밀 위치결정기구에 관한 연구
- ㆍ 저자명
- 이기하,최기봉,박기환,김수현,곽윤근
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 1998년|15권 11호|pp.199-207 (9 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
This paper presents the design and the control of three degree-of-freedom(DOF) fine positioning device based on an electro-magnetic force. The device is designed by use of a magnetic circuit theory and it is capable of fine motion due to the electro-magnetic force. The device consists of permanent magnets, yokes and coils. The magnetic fluxes generated from the permanent magnets constitute magnetic paths through steel, whereas the coils are arranged into the gap between two surfaces of the yokes. Therefore, by supplying current to the coils, the coils are capable of some motions due to Lorentz forces. For the optimal design of the actuating system, the system parameters are defined and investigated under the given constraints. From the system modeling in small displacement, three decoupled equations of motion are obtained. To get better performance of the system, a PID controller is implemented. Experimental results are presented in terms of time response and accuracy.