- 자기 부상 방식 미세 운동 기구의 동적 모델링
- ㆍ 저자명
- 정광석,백윤수,Jeong. Gwang-Seok,Baek. Yun-Su
- ㆍ 간행물명
- 大韓機械學會論文集. Transactions of the Korean Society of mechanical engineers. A. A
- ㆍ 권/호정보
- 2000년|24권 5호|pp.1166-1174 (9 pages)
- ㆍ 발행정보
- 대한기계학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
In this paper, we introduce a positioner based on magnetic levitation to eliminate the friction which is the most severe effect to limit high resolution on the micro level. Differently from existing electromagnetic device, the proposed positioner consists of air core solenoid and permanent magnet. Although the combination produces small magnetic force, it is suitable for realizing micro motion repeatedly without the accumulation of error because there is no hysteresis caused by ferromagnetic materials, no eddy current loss, no flux saturation. First, the approximate modeling of stiffness and damping effects between the magnetic elements is made and verified experimentally. Then, we have formulated the dynamic equation of one d.o.f magnetic levitation positioner using linear perturbation method and discussed the necessity of optimization for the chief design parameters to maximize the stability performance.