We present a compensation method of the phase change upon reflection in the scannll1g whIte light interferometry. which pracl1cally allows precIse 3-D profIle mappmg for compo~Ite target surfaces comprising of multipledissinular matenals. The compensation method estimates the vanatlon 01 pbase change with the spectral distribution of the light source through first-order approximation, and then diIectly compensates the measurement errors by perIormmg two-wavelength white light intetferomctric measurements. Experimental results prove that the proposed self-compensatIOn mcthod is capable of reducing the measmement error in step height gauging within $pm2nm$.</TEX>.