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Spin-coating에 의한 $Ge_{20}As_{20}Se_{60}$ 비정질 chalcogenide 박막의 제조 및 광특성 분석
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  • Spin-coating에 의한 $Ge_{20}As_{20}Se_{60}$ 비정질 chalcogenide 박막의 제조 및 광특성 분석
저자명
이강구,최세영
간행물명
한국세라믹학회지
권/호정보
2000년|37권 3호|pp.219-226 (8 pages)
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한국세라믹학회
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

Amorphous Ge20As20Se60 chalcogenide thin films were prepared by spin coating technique from mixed solutions of As40Se60 and Ge40Se60 dissolved in ethylenediamine. Films were prepared at a roating speed of 3500 rpm and spinning time was 10 second and heat-treateed at 27$0^{circ}C$ for 1 hour. The resulting film thickness and RMS roughness were approximately 340 nm and 15$AA$. Photostructure changes were investigated with 514.5nm Ar+ laser irradiation and heat-treatment. After Ar+ laser irradiation, transmittance and transmission efficiency decreased respectively up to 24.9% at 2.43 eV and 67.5% at 3.27 eV, and absorption edge shifted toward long wavelength. Optical bandgap changed from 2.03 to 1.83 eV, and absoprtion coefficient and absorption efficiency increased up to 0.33$ imes$105cm-1 at 3.37eV and 88.3% at 1.31 eV, respectively. These photodarkening state were recovered reversibly by heat-treatment at 27$0^{circ}C$ for 1 hour. Photodarkening and thermal bleaching effects by laser irradiation and heat-treatment revealed reversible amorphous-to-amorphous transition varying only coordination number.