In piercing operation for small hole in very thin plate, micro burrs are formed. The micro burr is very difficult to remove because the thin plate is to be deformed during deburring and deteriorate accuracy. As a first step to remove the micro burrs effectively, the burr must be measured accurately as much as possible. For most micro burrs are so small as less than 10$mu extrm{m}$, it is very difficult to measure. Several methods are reviewed to measure the micro burr formed in piercing operation from very thin plate with thickness less than 0.1mm. Also the effective deburring methods are reviewed. Barreling ultrasonic and chemical deburring methods are performed and the results are compared.