- 2축 이송계 정밀도 측정을 위한 레이저 간섭계 4축 자동정렬장치 개발
- ㆍ 저자명
- 김현수,홍성욱,Kim. Hyun-Soo,Hong. Seong-Wook
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2000년|17권 9호|pp.75-80 (6 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Although laser interferometer is widely accepted as a tool for measurement of motion accuracy the set-up procedure is time-consuming because of the strict requirement on alignment between laser head and optic units. This paper presents a 4-axis auto-aligning system which is useful for easy set-up of laser interferometer so as to evaluate precision of a 2-axis feeding system. This paper proposes two ideas for alignment in laser interferometer set-up: one is use of mirror and retroreflectors. and the other is taking advantage of the pre-defined movement and peculiar characteristic of retroreflecotrs. The pros and cons of the two methods are discussed. Illustrative experimental results are presented in which the developed system is applied to a XY table.