To improve $CO_2$pemselectivity, a modified silica membrane was prepared by chemical vapor deposition with tetraethoxysilane(TEOS)-ethanol-water, and TEOS-ethanol-water-HCI solution at 300-$600^{circ}C$. The silica was effectively deposited in the mesopores of a ${gamma}$-alumina film coated on a porous $alpha$-alumina tube by evacuating the reactants through the porous wall. In this membrane, $CO_2$interacts, to some extent, with the pore wall, and $CO_2$/$N_2$selectivity then exceeds the value of the Knudsen diffusion mechanism, while the membrane derived from TEOS alone has no $CO_2$selectivity. The silica membrane prepared from TEOS-ethanol-water-HCI solution showed that $CO_2$permeance was $2.5$ imes$10^{-7}mol/s^{-1}.m^{-2}.Pa^{-1} at 30{circ}C$</TEX> and $CO_2$/$N_2$selectivity was approximately 3. The $CO_2$permeance and selectivity was improved by enlarging the surface diffusion with modification of chemical affinity of the silica pores