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레이저빔에 의한 PDP 격벽 재료의 식각
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  • 레이저빔에 의한 PDP 격벽 재료의 식각
저자명
안민영,이경철,이홍규,이천,이상돈
간행물명
전기전자재료학회논문지
권/호정보
2000년|13권 6호|pp.526-532 (7 pages)
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한국전기전자재료학회
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정기간행물|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
서지반출

기타언어초록

The paste on the glass or fabrication of the PDP(Plasma Display Panel) barrier rib was selectively etched using focused A $r_{+}$ laser(λ=514 nm) and Nd:YAG(λ=532, 266 nm) laser irradiation. The depth of the etched grooves increase with increasing a laser fluence and decreasing a laser beam scan speed. Using second harmonic of Nd:YAG laser(532 nm) the etching threshold laser fluence was 6.5 mJ/c $m^2$ for the sample of PDP barrier rib. The thickness of 180 ${mu}{ extrm}{m}$ of the sample on the glass was clearly removed without any damage on the glass substrate by fluence of 19.5J/c $m^2$beam scan speed of 20${mu}{ extrm}{m}$ /s. In order to increase the etch rate of the barrier rib material barrier rib samples heated by a resistive heater during laser irradiation. The heated sample has many defects and becomes to be fragile. This imperfection of the structure compared to the sample without heat treatment allows the effective etching by the focused laser beam. The etch rates were 65${mu}{ extrm}{m}$/s and 270 ${mu}{ extrm}{m}$/s at room temperature and 20$0^{circ}C$, respectively.y.