In this research, the mathematical modeling of the formation of SiC layer on the activated carbon was studied to improve the durability and the oxidation resistance of catalyst supports. SiC layer on the activated carbon was formed by permeating SiC from dichlorodimethylsilane(DDS) into pores and depositing while the porous structure was kept. The best conditions of manufacturing the support were found by studying the characteristics of SiC/C which was modelled under various deposition conditions. Changes of the amount of deposition, the pore diameter, the surface area with time were obtained by simulating convection, diffusion and reaction in an isothermal reactor at a steady state. The uniform deposition in the pores of samples was obtained at a lower concentration of the reactant and a lower pressure. Additionally, it was observed that the pore diameter and the surface area have points of inflection at certain times of deposition, because deposition occurred on the inside surface of the pore at first and then on the outside surface of the particle.