- 고출력 레이저 어블레이션에 의한 실리콘 가공시 발생하는 상폭발 현상에 관한 연구
- ㆍ 저자명
- 정성호
- ㆍ 간행물명
- 한국레이저가공학회지
- ㆍ 권/호정보
- 2000년|3권 3호|pp.39-45 (7 pages)
- ㆍ 발행정보
- 한국레이저가공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
The volume and depth of the craters produced on silicon samples during high power laser ablation show a strong nonlinear change as the laser irradiance increases across a threshold value, approximately 2.2$ imes$10$^$10/ W/㎠. Time-resolved shadowgraph images of the ablation plume reveal the ejection of large particulates from the sample for laser irradiance above the threshold, with a time delay of about 300-400 ㎱. The numerically estimated thickness of the superheated liquid layer, considering the transformation of liquid metal into liquid dielectric near the critical state, agrees with the measured agrees with crater depths. It is suggested that a phase explosion of the deep superheated liquid layer near the critical state is responsible for the measured sudden increase of crater volume and the ejection of large particulates.