- PC 기반의 다이싱 공정 자동화 시스템 개발
- ㆍ 저자명
- 김형태,양해정,송창섭
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2000년|17권 3호|pp.47-57 (11 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
In this study, PC-based dicing machine and driving software were constructed for the purpose of automation of wafer cutting process. To automate the machine, hard automation including vision, loading, and software were considered in the development. Auto loading device and vision system were adopted for the increase of productivity, GUI software programmed for the expedient operation. The dicing machine is operated by the control algorithm and some parameters. It is verified that this kind of PC based automation has a great potential compared with the conventional dicing machine when applied to manufacturing some kinds of wafers as a test purpose.