본 논문에서는 광대역 특성을 가진 고주파 압전 변환기를 이론적으로 고찰하였고, 압전변환기를 제작하여 이론값과 실험값을 비교, 분석하여 그 응용가능성을 확인하였다. ZnO(3.825${mu}m$/Pt/Sapphire(0001)구조의 압전변환기의 공진주파수는 827.47MHz로서 압전체의 반파장주파수에서 공진이 일어남을 알 수 있었다. 또한, 삽입손실은 약 -50dB이었고, 최소의 삽입손실은 이론적인 분석과 잘 일치하였다.
In this paper, piezoelectric transducer was theoretically analyzed to fabricate high frequency piezoelectric transducer with broadband characteristics. Piezoelectric transducer have been fabricated with 3.825${mu}m$ ZnO film on Pt/Sapphire(0001), and its appilicability of transducer was confirmed with analyzing theoretical and experimental frequency characteristic. The resonance frequency was detected at the frequency of 827.47MHz corresponding to the half-wavelength frequency of ZnO thin film. Insertion loss was almost -50dB. The minimum insertion loss agrees with simulation analysis.
