Recently, FET type dissolved oxygen sensor was proposed to overcome the disadvantages of the amperometric Clark-type sensor. The inherent problem of the proposed sensor, however, is the flow dependence of the sensor performances since the proposed sensor detects the pH change in close proximity to the working electrode. In this study, we decided the direction which minimize the flow effect in FIA(flow injection analysis) system. And a hydrodynamic buffer layer which can reduce the flow dependence were proposed. The suggested buffer-layers were formed onto sensing area and working electrode with mixed polymer matrix of TEOS(tetraethylorthosilicate) and DEDMS(diethoxydimethylsilane).