This paper describes a new method for measuring the changes in specific surface asperities arising from processes such as finishing, coating, wear and corrosion. In repetitive measurements, relocation device gives the same position and orientation so that specific profile can be obtained. A low-cost relocation device is designed and its performance is assessed. The error in relocation process is compensated by statistic compensation algorithm. And, a removing process of cusp by grinding is observed by the proposed method.