In order to investigate the possibility of impact punching in brittle materials, an experimental setup was developed. In the setup, a long bar as a punch was used to apply the impact load to the specimen plate and measure the applied impact force during the impact punching process. Impact punching tests with various shape of punches were performed in soda-lime glass and silicon wafer under a different level of contact pressure. The damage appearance after the impact punching was examined according to the applied contact pressure. The minimum contact pressure required for a complete punching in glass specimens without development of radial cracks around the punched hole was sought at each condition. The minimum contact pressure increased with increasing the thickness of specimens and decreasing the end radius of punches. The profile of impact forces was measured during the impact punching experiment, and it could explain well the behavior of the punching process in brittle material plates. The measured impact force increased with increasing the contact pressure applied to the plates.