In this study, a new PWM method considering the actuation delay of high speed solenoid valves is proposed to improve the response characteristics of electro hydraulic servo systems controlled by high speed solenoid valves. In addition, the decision method for the system gain, the basic period of PWM, and the sampling time is proposed, Since the conventional system controlled by high speed solenoid valves is too slow to apply this method, a high speed driving circuit(Quick-Drive) which enables rapid switching of the high speed solenoid valve at a high speed sampling mode is applied to realize this method. The experimental result shows that it is possible to achieve precision and quiet control without occurrence of limit cycle and wide range dead band.