- Homodyne 간섭계에서의 비선형성 측정과 보정
- ㆍ 저자명
- 김종윤,엄태봉,정규원,최태영,이건희,Kim. Jong-Yun,Eom. Tae-Bong,Jeong. Kyu-Won,Choi. Tae-Young,Lee. Keon-Hee
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2001년|18권 9호|pp.171-178 (8 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
The nonlinearity of a laser interferometer usually ranges from sub-nanometer to several manometers. This nonlinearity, which has periodic characteristics, limits the accuracy of the interferometer at the sub-nanometer level. The nonlinearity error of the one-frequency homodyne interferometer with quadrature fringe detection results from a number of factors including polarization mixing by imperfect optical elements, unequal gain of photo detectors, lack of quadrature between two signals and misalignment. In this paper, we described a method for measuring and compensating the nonlinearity of homodyne interferometer using the elliptical fitting technique with least-square method. Experimental results demonstrate that $^pm$3.5 nm nonlinearity can be reduced to $^pm$0.2 nm level.