In this paper, we design and implement the DC characteristic measurement system for semiconductor devices. The proposed system is composed of 4 SMU(Source and Measure Unit) channels. Various efforts in hardware and software have been made to reduce the measurement errors. Internal and external sources of errors in measurement system especially in pA range measurement have been identified and removed. Also, various digital signal processing techniques are developed. Calibration is executed under the control of microprocessor periodically. Experimental results show that the implemented system can measure the DC characteristic of semiconductor devices with less than 0.2% error in various voltage and current source/measurement range.