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Pull-in과 release 전압차 감소용 돌기구조를 갖는 비틀림형 초소형 기계적 스위칭 소자
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  • Pull-in과 release 전압차 감소용 돌기구조를 갖는 비틀림형 초소형 기계적 스위칭 소자
저자명
하종민,한승오,박정호,Ha. Jong-Min,Han. Seung-O,Park. Jeong-Ho
간행물명
전기학회논문지. The transactions of the Korean Institute of Electrical Engineers. C/ C, 전기물성·응용부문
권/호정보
2001년|50권 9호|pp.471-475 (5 pages)
발행정보
대한전기학회
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정기간행물|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

ln this paper, a micromachined micromechanical switch is presented. The presented switch is operated in the vertical direction to the substrate by an electrostatic force between two parallel plates. The moving plate is pulled down to connect the bumps of the bias node$(V_{DD}/ or GND)$ to the bumps of the output node when a oltage difference exists between the moving plate and the input plate. The switch was designed to operate at a low switching voltage$( isingdotseq5V)$ by including a large-area, narrow-gap, parallel plate capacitor A theoretical analysis of the designed switch was performed in order to determine its geometry fitting the desired pull-in voltage and release voltage. The designed switch was fabricated by surface micromachining combined with Ni electroplating. From the experimental results of the fabricated switch, its pull-in voltage came Out to be less than 5V and the measured maximum allowable current was 150mA. The measured average ON-state resistance was about 8$Omega$, and the OFF-state resistance was too high to be measured with digital multimeter